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This paper deals with the development of state-of-the-art metal oxide semiconductor (MOX) gas sensors based on ultra-low-power (ULP) consumption micro-machined hotplates and targeted to VOC detection at ppb-level. A very simple, single metal, front-side silicon bulk micromachining fabrication technology was conceived and proposed. Several types of ULP devices, differing in shape and size, have been designed and fabricated to assess both the most efficient layout geometry and optimal fabrication process parameters. The ULP hotplates functional behavior was thoroughly investigated, and typical results on measurements of the hotplate temperature vs. applied power are reported. A very satisfactory value of 8.9 mW at 400 °C can be highlighted, for a device featuring an innovative self-insulated layout between heater and sensing layer. Transient temperature responses and evaluation of the hotplate …
Publication date: 
10 Dec 2008

I Elmi, S Zampolli, E Cozzani, F Mancarella, GC Cardinali

Biblio References: 
Volume: 135 Issue: 1 Pages: 342-351
Sensors and Actuators B: Chemical