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Ion beam analysis (IBA) includes a group of techniques for the determination of elemental concentration depth profiles of thin film materials. Often the final results rely on simulations, fits and calculations, made by dedicated codes written for specific techniques. Here we evaluate numerical codes dedicated to the analysis of Rutherford backscattering spectrometry, non-Rutherford elastic backscattering spectrometry, elastic recoil detection analysis and non-resonant nuclear reaction analysis data. Several software packages have been presented and made available to the community. New codes regularly appear, and old codes continue to be used and occasionally updated and expanded. However, those codes have to date not been validated, or even compared to each other. Consequently, IBA practitioners use codes whose validity, correctness and accuracy have never been validated beyond the authors’ efforts …
Publication date: 
1 Sep 2007

NP Barradas, K Arstila, G Battistig, M Bianconi, N Dytlewski, C Jeynes, E Kótai, G Lulli, M Mayer, E Rauhala, E Szilágyi, M Thompson

Biblio References: 
Volume: 262 Issue: 2 Pages: 281-303
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms