Type:
Journal
Description:
Thin-film transistors (TFTs), which use zinc oxide (ZnO) as an active layer, were fabricated and investigated in detail. The transport properties of ZnO deposited by spray pyrolysis (SP) on a TFT structure are studied in a wide range of temperatures, electrical conditions (i.e., subthreshold, above-threshold linear, and saturation regions), and at different channel lengths. It is shown that ZnO deposited by SP is a nanocrystalline material; its field-effect mobility is temperature activated and increases with carrier concentration. On the basis of this analysis, we propose the multiple-trapping-and-release (MTR)-transport mechanism to describe the charge transport in ZnO. By means of numerical simulations, we prove that MTR is a suitable approach, and we calculate the density of states. We show that the tail states extend in a wide range of energy and that they strongly influence the transport properties. Finally, an analytical …
Publisher:
IEEE
Publication date:
16 Jun 2011
Biblio References:
Volume: 58 Issue: 8 Pages: 2610-2619
Origin:
IEEE Transactions on Electron Devices