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A new Micro-Opto-Mechanical System (MOMS) technology for the fabrication of optoacoustic probes on optical fiber is presented. The technology is based on the thermoelastic emission of ultrasonic waves from patterned carbon films for generation and on extrinsic polymer Fabry-Perot acousto-optical transducers for detection, both fabricated on miniaturized single-crystal silicon frames used to mount the ultrasonic transducers on the tip of an optical fiber. Thanks to the fabrication process adopted, high miniaturization levels are reached in the MOMS devices, demonstrating fiber-optic emitters and detectors with minimum diameter around 350 and 250 μm respectively. A thorough functional testing of the ultrasound emitters mounted on 200 and 600 μm diameter optical fibers is presented, in which the fiber-optic emitter with a diameter of 200 μm shows generated acoustic pressures with peak-to-peak value up …
Springer US
Publication date: 
1 Jun 2014

E Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, E Biagi

Biblio References: 
Volume: 16 Issue: 3 Pages: 415-426
Biomedical microdevices