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In this communication we present the fabrication and characterization of oxidized porous silicon (Psi) micropatterns, obtained by direct laser writing, and chemically functionalized for biological applications. The laser local oxidation technique is a good alternative to the traditional photolithographic process since this approach allows the development of micropatterned biosensors. In fact, from a technological point of view, the standard masking of Psi by means of photoresist presents remarkable difficulties because of the low resistance to the electrochemical process. The micropatterned Psi oxidized surfaces can be properly fnnctionalized by a specific chemical linker. The modified surface is able to link the carboxylic or aminic groups of biological probes. The binding between the functionalized surface and the biological matter has been tested by directly spotting on the Psi local oxide a fluorescent labelled antibody …
Publication date: 
1 Jan 2008

L De Stefano, L Rotiroti, I Rea, E De Tommasi, MA Nigro, FG DELLA CORTE, I Rendina

Biblio References: 
Pages: 382-387
Sensors And Microsystems