Type:
Conference
Description:
In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.
Publisher:
International Society for Optics and Photonics
Publication date:
22 Jan 2005
Biblio References:
Volume: 5718 Pages: 38-47
Origin:
Microfluidics, BioMEMS, and Medical Microsystems III