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Type: 
Conference
Description: 
In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.
Publisher: 
International Society for Optics and Photonics
Publication date: 
22 Jan 2005
Authors: 

Luca De Stefano, Krzysztof Malecki, Luigi Moretti, Ivo Rendina

Biblio References: 
Volume: 5718 Pages: 38-47
Origin: 
Microfluidics, BioMEMS, and Medical Microsystems III