Silicon is the most widely used material in the microelectronics industry and it is becoming more widespread in integrated optic and opto-electronic fields. We present the thermo-electro-optical analysis of an integrated waveguide-vanishing-based optical modulator based on the free carrier dispersion effect. This particular structure allows one to obtain a planar device, with an easier CMOS compatible microelectronic integration. The implantation processes have been carefully tuned in order to get higher doping uniformity and a sharp profile. The process-flow is defined using the 2D process simulation software ATHENA (SILVACO International). The 2D semiconductor device simulation package ATLAS (SILVACO International) has been employed to analyse the coupled electro-thermal behaviour of our modulator in static and dynamic conditions. The electrical section of the modulation acts as a lateral p–i–n diode …