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In this article, we investigate the effects of oxygen partial pressure in the deposition chamber on the optical properties of zinc oxide (ZnO) thin films; in particular, we examine the variation of the refractive index with oxygen flux. ZnO thin films were deposited by radio-frequency (RF) magnetron sputtering and studied by means of X-ray diffraction (XRD) and spectroscopic ellipsometry (SE). We have found a preferential c-axis growth of ZnO films, with slightly variable deposition rates from 2.6 to 3.8 Å/s. Conversely, the refractive index exhibits, from ultraviolet (UV) to near infrared (IR), a considerable and almost linear variation when the oxygen flux value in the deposition chamber varies from 0 to 10 sccm.
Academic Press
Publication date: 
1 Jul 2007

M Gioffre, M Angeloni, M Gagliardi, M Iodice, G Coppola, C Aruta, FG Della Corte

Biblio References: 
Volume: 42 Issue: 1-6 Pages: 85-88
Superlattices and Microstructures