-A A +A
We have fabricated a microarray of porous silicon Bragg reflectors on a crystalline silicon substrate using a technological process based on standard photolithography and electrochemical anodization of the silicon. The array density is of 170 elements/cm2 and each element has a diameter of 200 μm. The porous silicon structures have been used as platform to immobilize an amino terminated DNA single strand probe. All fabrication steps have been monitored by spectroscopic reflectometry, optical and electron microscopy, and Fourier transform infrared spectroscopy. A label-free detection method has been employed to investigate the hybridization between micromolar DNA probe and its complementary target. Due to fast and low cost production, good reproducibility, and high quality optical features, this platform could be adopted also for other different microarray applications such as proteomics and medical …
Publication date: 
1 Jan 2010

Ilaria Rea, Annalisa Lamberti, Ivo Rendina, Giuseppe Coppola, Mariano Gioffrè, Mario Iodice, Maurizio Casalino, Edoardo De Tommasi, Luca De Stefano

Biblio References: 
Volume: 107 Issue: 1 Pages: 014513
Journal of Applied Physics