We present an experiment that gives insight into the origin of the dependence of the hole mobility (μ) on the dopant species in heavily doped p-type Si under low electrical field. The Hall carrier concentration and mobility were measured in Si coimplanted with B and Ga in the 0.1–2× 10 20 cm− 3 concentration range. The strain induced by substitutional dopants, detected by high resolution x-ray diffraction, was varied by changing the relative B and Ga concentration. The effect of strain on mobility was disentangled and a linear relationship between 1/μ and the perpendicular strain was found.
American Physical Society
28 Sep 2006
Volume: 97 Issue: 13 Pages: 136605
Physical review letters