During electron-gun deposition of metal layers on semiconductors, the semiconductor is bombarded with low-energy metal ions creating defects in the outermost surface layer. For many years, it has been a puzzle why deep-level transient spectroscopy spectra of the as-deposited, electron-gun evaporated, n-type Schottky diodes are so simple displaying only one peak consisting of the merged E center and single-acceptor divacancy peaks, and no A center and double-acceptor divacancy peaks. With reference to a recent publication, we demonstrate that this is not due to a reduced production of divacancies and A centers in this situation but to the localization of these defects in highly defected regions.
American Institute of Physics
1 Jan 2009
Volume: 105 Issue: 1 Pages: 014501
Journal of Applied Physics