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Optimal process parameters for phosphorus spin-on-doping of germanium

Type:

Journal

Description:

Publisher:

North-Holland

Publication date:

15 Jan 2017

Authors:

Virginia Boldrini, Sara Maria Carturan, Gianluigi Maggioni, Enrico Napolitani, Daniel Ricardo Napoli, Riccardo Camattari, Davide De Salvador

Biblio References:

Volume: 392 Pages: 1173-1180

Origin:

Applied Surface Science

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…