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Type: 
Journal
Description: 
In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
Publisher: 
Springer-Verlag
Publication date: 
1 Jun 2013
Authors: 

Andrea Lucibello, Emanuela Proietti, Romolo Marcelli, Giancarlo Bartolucci

Biblio References: 
Volume: 19 Issue: 6 Pages: 845-851
Origin: 
Microsystem technologies