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RF MEMS in low-temperature co-fired ceramics (LTCC) technology have been designed, manufactured and tested for potential utilization in reconfigurable space sub-systems. Specifically, single-pole-single-throw (SPST) and single-pole-double-throw (SPDT) ohmic switch configurations have been studied for wide-band applications. Advantages coming from the measured RF performances and from the integration of RF MEMS by means of the LTCC technology only, to be used also for packaging, are discussed. Furthermore, preliminary on-wafer DC test on a double-pole-double-throw (DPDT) ohmic switch has been done in order to check both the mechanical response and the quality of the ohmic contact (contact resistance).
Springer Berlin Heidelberg
Publication date: 
1 Jan 2018

Andrea Lucibello, Romolo Marcelli, Ernesto Di Paola, Sergio Di Nardo, Daniele Pochesci, Renato Croci, Chiara Germani

Biblio References: 
Volume: 24 Issue: 1 Pages: 511-518
Microsystem Technologies