We deposited by the Reothaxial Growth and Thermal Oxidation growth technique thin films of Fe-doped Indium oxide for ozone and NO 2 sensing. SEM and TEM analyses on annealed and as-deposited films showed that Fe doping promotes formation of nanosized core-shell structures, prevents coarsening of the grains and higher stoichiometry is achieved. The effect of iron on sensing behavior towards O 3 is to reduce the optimal working temperature for ozone detection down to 250 C. Iron doping enhances also detection of low NO 2 conentration at 250 C. The interference from reducing gases like CO, ethanol and methanol is negligible at 250 C, and increase at higher working temperatures.
11 Sep 2005
Proc. Eurosensors XIX, Barselona, Spain