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The capillary distribution of reliable solutions for gas detections implies identifying high throughput and up-scalable approaches for the growth of porous active materials with high surface to volume ratio and high surface avaialability/reactivity. Thereby we implemented a competitive method to render thin (hundreds of nanometers) TiO2 layers highly sensitive to gas species. This method is easily implementable in gas sensor devices with an additional ending step at room temperature without any temperature needed for reaction. It is based on the local oxidation of sputtered Ti atoms that land grazing on the sensor architecture (called gig-lox process). The process gives rise to a contaminant-free TiO2 spongy structure consisting of rods separated by meso-pores arising from the grazing geometry; the rods, on their side, have an internal branched structure creating an interconnected network of nano-pores. The overall …
Publication date: 
15 Apr 2018

A Alberti, L Renna, S Sanzaro, E Smecca, G Mannino, C Bongiorno, C Galati, L Gervasi, A Santangelo, A La Magna

Biblio References: 
Volume: 259 Pages: 658-667
Sensors and Actuators B: Chemical