-A A +A
Recently, a new Micro-Raman technique has been used to detect extended defects in 4H-SiC homoepitaxy. The method is based on the local increase of free carriers in undoped epitaxies (n< 10 16 at/cm-3) produced by a high power laser. The Longitudinal optical Raman mode (LO) is coupled with the electronic plasma generated by the laser pumping; such a Raman signal is sensitive to crystallographic defects that lead to trapping (or dispersion) of the free carriers which results in a loss of coupling. The monitoring of the LOPC allows determining the spatial morphology of extended defects. The results show that the detection of defects via the induced-LOPC (i-LOPC) is totally independent from the stacking fault photoluminescence signals that cover a large energy range up to 0, 7eV thus allowing for a single-scan simultaneous determination of any kind of stacking fault. Also, the i-LOPC method shows the …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2015

Nicolo’ Piluso, Massimo Camarda, Ruggero Anzalone, Francesco La Via

Biblio References: 
Volume: 821 Pages: 335-338
Materials Science Forum