-A A +A
Phase Change Memory (PCM) operation relies on the reversible transition between two stable states (amorphous and crystalline) of a chalcogenide material, mainly of composition Ge2Sb2Te5 (GST). In Wall type PCM cells, cycling endurance induces a gradual change of the cell electrical parameters caused by variations in the chemical composition of the active volume. The region closer to the GST-heater contact area, becomes more Sb rich and Ge depleted. The new alloy has usually different thermal characteristics for the phase transitions that influence the electrical behavior of the cell. In this study we analyze the morphological, structural and electrical properties of two Sb-rich non-stoichiometric alloys: Ge14Sb35Te51 and Ge14Sb49Te37, at their amorphous and crystalline phase. Experiments have been performed in non-patterned blanket films and, to simulate the device size, in amorphous regions of 20 nm …
Publication date: 
1 Jul 2017

G D’Arrigo, AM Mio, M Boniardi, A Redaelli, E Varesi, S Privitera, G Pellegrino, C Spinella, E Rimini

Biblio References: 
Volume: 65 Pages: 100-107
Materials Science in Semiconductor Processing