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Type: 
Journal
Description: 
We report here on the state of our fabrication process for Superconducting Single Photon Detectors (SSPDs). We have fabricated submicrometer SSPD structures by electron beam lithography using very thin (10 nm) NbN films deposited by DC-magnetron sputtering on different substrates and at room substrate temperature. The structures show a fast optical response (risetime
Publisher: 
North-Holland
Publication date: 
15 Apr 2006
Authors: 

R Leoni, F Mattioli, MG Castellano, S Cibella, P Carelli, S Pagano, D Perez de Lara, M Ejrnaes, MP Lisitskyi, E Esposito, R Cristiano, C Nappi

Biblio References: 
Volume: 559 Issue: 2 Pages: 564-566
Origin: 
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment