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Ta2O5 thin films were prepared by spin-coating methanol solutions of Ta chloromethoxide. It was prepared by reacting TaCl5 with methanol, followed by water addition (H2O: Ta molar ratio was 16). Thin films were deposited by spin-coating onto SiO2/Si substrates, followed by drying at 90 °C and heat-treatment up to 700 °C. The films were characterized by X-ray diffraction, transmission electron microscopy and field emission scanning electron microscopy. Crystallization was obtained only after heating at 700 °C, in the Ta2O5 orthorhombic phase. The resulting films had a thickness of 100 nm. Their structure was constituted by porous crystals with size up to 50 nm, while the pores had a size of about 10 nm. The results demonstrated that TaCl5 is very convenient precursor for the wet chemical synthesis of Ta2O5 thin films.
Publication date: 
31 Mar 2014

Mauro Epifani, Reza Zamani, Jordi Arbiol, Cristian Fabrega, Teresa Andreu, Giovanni Battista Pace, Pietro Siciliano, Joan R Morante

Biblio References: 
Volume: 555 Pages: 39-41
Thin Solid Films