-A A +A
Free standing 3C-SiC wafers with a dimeter of 50 mm and a thickness of ca. 0.8 mm have been grown on a regular base using 3C-SiC CVD seed transfer from Si wafers to a poly-SiC-carrier and a sublimation epitaxy configuration. Up to the thickness of almost 1 mm, stable growth conditions of the cubic polytype have been achieved. The high supersaturation was kept stable by the proper design of the hot zone that enables a high axial temperature gradient at the growth interface. The Sirich gas phase was realized by the application of a Tantalum getter that was integrated into the graphitebased growth cell. Furthermore, an adaption of the growth setup allowed the growth of 3C material with a diameter of 95 mm and bulk material up to 3 mm on 25 mm diameter. Computer simulations were used to determine the supersaturation of the growth setup for different source-to-seed distances. The minimum supersaturation …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2020

Peter J Wellmann, Philipp Schuh, Manuel Kollmuss, Michael Schöler, Johannes Steiner, Marcin Zielinski, Marco Mauceri, Francesco La Via

Biblio References: 
Volume: 1004 Pages: 113-119
Materials Science Forum