
A Gemini Field Emission Scanning Electron Microscope (FE-SEM) Carl Zeiss SUPRA™ 25 is equipped with (i) an EDAX Energy Dispersive X-Rays (EDX) detector, (ii) a Gemini multi-mode scanning Transmission Electron Microscope (STEM) detection system and (iii) a Gatan MonoCL4™ system for cathodoluminescence (CL) microscopy.
SEM Resolution: 1.7 nm @ 15 kV
3.5 nm @ 1 kV
Acceleration Voltage: 0.5 - 30 kV
Probe Current: 4 pA - 10 nA
Detectors: High efficiency In-lens detector
Secondary electrons detector
STEM detector
EDX microanalysis detector for imaging/mapping and X-Rays Spectroscopy
CL system for Panchromatic and Monochromatic imaging and Spectroscopy (Spectral response 185- 850 nm)
Source:
News: