Metrology, control and electrical characterization

The laboratory is dedicated to perform the measurements necessary for verification of process steps and to evaluate the electrical performances on test structures and devices at wafer level. Both manual and automatic systems are available.

 

Optical and laser lithography

The Laboratory is an ISO 5 clean room that includes facilities for Photolithography processes.

Growth, deposition, and thermal processes

The laboratory includes facilities dedicated to deposition and growth on wafer substrates of several materials such as semiconductors (TiO2, ZnO, Si, Ge, Al2O3), metals (Ti, Ni, Pd, Pt Tu, Ag, Au, Al), and different carbon allotropes as  CNT, Graphene layers, by u

Polynomial -type action for general relativity and anti-self-dual gravity

Authors: 

Diego Gonzalez, Mariano Celada, Merced Montesinos

DLTS study on Al+ ion implanted and 1950 C annealed pin 4H-SiC vertical diodes

Authors: 

Hussein M Ayedh, Maurizio Puzzanghera, Bengt Gunnar Svensson, Roberta Nipoti

BOTDA sensing employing a modified Brillouin fiber laser probe source

Authors: 

Diego Marini, Marco Iuliano, Filippo Bastianini, Gabriele Bolognini

Compressed sensing tomography of inorganic and biological samples in the scanning electron microscope operated in the transmission mode

Authors: 

Ferroni Matteo, Alberto Signoroni, Andrea Sanzogni, Andrea Migliori, Luca Ortolani, Vittorio Morandi

Thickness and orientation dependence of the average HAADF STEM normalized intensity: a comparison with Monte Carlo and Multislice simulations.

Authors: 

Andrea Parisini, Stefano Frabboni, Gian Carlo Gazzadi, Aldo Armigliato, Rodolfo Rosa

Ni-Al-Ti Ohmic Contacts with Preserved form Factor and Few 10-4 Ωcm2 Specific Resistance on 0.1-1 Ωcm P-Type 4H-SiC

Authors: 

Roberta Nipoti, Maurizio Puzzanghera, Mariaconcetta Canino, Giovanna Sozzi, Paolo Fedeli

Perimeter and Area Components in the – Curves of 4H-SiC Vertical p+-i-n Diode With Al+ Ion-Implanted Emitters

Authors: 

Roberta Nipoti, Maurizio Puzzanghera, Giovanna Sozzi, Roberto Menozzi

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