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Type: 
Book
Description: 
Thermal sensors based on silicon micromachining have many applications in the MEMS field. In order to design such devices for an optimized performance a flexible simulation model is needed. We propose here a computationally efficient modeling technique for computer aided design of micro thermal sensors.
Publisher: 
Publication date: 
1 Jan 2008
Authors: 

F MANCARELLA, A RONCAGLIA, M PASSINI, GC CARDINALI, M SEVERI

Biblio References: 
Pages: 152-156
Origin: 
Sensors And Microsystems