JA Van Den Berg, MA Reading, A Parisini, M Kolbe, B Beckhoff, S Ladas, M Fried, P Petrik, P Bailey, T Noakes, T Conard, S De Gendt
 
			  
             
			
				Biblio references:  
				Origin: Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009-216th ECS Meeting