Type:
Journal
Description:
Phase Change Memory (PCM) operation relies on the reversible transition between two stable states (amorphous and crystalline) of a chalcogenide material, mainly of composition Ge 2 Sb 2 Te 5 (GST). In Wall type PCM cells, cycling endurance induces a gradual change of the cell electrical parameters caused by variations in the chemical composition of the active volume. The region closer to the GST-heater contact area, becomes more Sb rich and Ge depleted. The new alloy has usually different thermal …
Publisher:
Pergamon
Publication date:
1 Jul 2017
Biblio References:
Volume: 65 Pages: 100-107
Origin:
Materials Science in Semiconductor Processing