Type:
Journal
Description:
Contact resistance is the main parameter used for assessing the high cycling reliability of RF microelectromechanical (RF-MEMS) switches. In this paper the use of a modified contact material is tested and compared to pure gold in cycling experiments performed on a RF-MEMS switch in shunt capacitive configuration. The modified contact material is a gold-based multilayer with a thin layer of platinum sandwiched between two layers of gold. The experiment consists in comparing devices with the same layout but …
Publisher:
Springer Berlin Heidelberg
Publication date:
1 Sep 2017
Biblio References:
Volume: 23 Issue: 9 Pages: 3843-3850
Origin:
Microsystem Technologies