Solid state gas sensors show different sensitivities to specific analytes at different working temperature, therefore selectivity can be improved by comparing gas sensor response at various temperatures. This work presents the simulations and the design of silicon micromachined microheaters for gas sensor arrays with a linear temperature gradient on active area in order to enhance selectivity to VOC analytes. The structures consist of microheaters integrated in a dielectric thin suspended membrane in order to obtain low power consumption. Temperature sensors have been also integrated in the devices for the working conditions monitoring.
1 Jan 2005
Sensors And Microsystems