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Type: 
Journal
Description: 
3. ResultsFigs. 2 show, respectively, the measured 100 etch rate (A) and underetch rates (B)-(C), for two different TMAH dilutions in water, namely 25% and 20% in
Publisher: 
World Scientific
Publication date: 
23 Jun 2005
Biblio References: 
Pages: 373
Origin: 
Sensors And Microsystems-Proceedings Of The 9th Italian Conference