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Type: 
Journal
Description: 
A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of ±50 μT with a sensitivity of 0.45 mV/μT.
Publisher: 
Elsevier
Publication date: 
8 Nov 2006
Authors: 

A Baschirotto, F Borghetti, E Dallago, P Malcovati, M Marchesi, E Melissano, P Siciliano, G Venchi

Biblio References: 
Volume: 132 Issue: 1 Pages: 90-97
Origin: 
Sensors and Actuators A: Physical