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Type: 
Conference
Description: 
Digital Holographic Microscopy (DHM) is an optical interferometric technique for not destructive testing of micro-electro-mechanical systems (MEMS). A characterization process based on a no-contact technique allows us to analyze deformations, warping, residual stress, cracks and more other defects of MEMS, without destroy them. The flexibility of this technique allows us to improve novel numerical reconstruction algorithm for the recovery of more information. The post processing of the acquired holograms allows to reduce noise, optical aberrations, defocusing. In particular, the hologram reconstruction process has been modified to obtain Extended Focus Images (EFI). In Digital holographic microscopy, the use of microscopy objectives with high magnifications, reduces the focus depth. This means that for extended object a single reconstructed image with all the details in focus is not possible to obtain. Using a …
Publisher: 
International Society for Optics and Photonics
Publication date: 
15 Sep 2006
Authors: 

Valerio Striano, Giuseppe Coppola, Pietro Ferraro, Domenico Alfieri, Simonetta Grilli, Sergio De Nicola, Andrea Finizio, Giovanni Pierattini

Biblio References: 
Volume: 6341 Pages: 63411T
Origin: 
Speckle06: Speckles, From Grains to Flowers