In this paper a new approach to obtain low losses coplanar waveguide (CPW) lines is described. A photolithographic process is performed by using SU-S thick negative photo-resist on low resistivity silicon to obtain CPW lines elevated with respect to the substrate to get the advantages from transmission line structures which are almost on-the-air.
3 Oct 2005
Volume: 1 Pages: 107-110
CAS 2005 Proceedings. 2005 International Semiconductor Conference, 2005.