Material Properties Measurement and Numerical Simulation for Characterization of Ultra-Low-Power Consumption Hotplates

Data di pubblicazione: 1 Gen 2007

ConvegnoFonte dati: OPENALEXTipo OpenAlex: conference-paperAccesso chiuso
Autori: E. Cozzani, Alberto Roncaglia, Stefano Zampolli, Ivan Elmi, Fulvio Mancarella, Fabrizio Tamarri, Gian Carlo Cardinali

The results of a thorough thermoelectric characterization, performed both in a vacuum chamber and at atmospheric pressure, of ultra-low-power hotplates based on suspended structures with different layouts are presented in this work and compared with thermoelectric 2D and thermal 3D finite elements simulations. Electrical and thermal properties of the thin films used in the devices have been also measured, involving appropriate on-chip test structures, and their values were employed in both 2D and 3D model. Temperature vs. heating power experimental curves showed the great influence of conduction through air on power consumption and an excellent agreement with the simulated results.

Fonte
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Pagine
1661-1664
Citazioni
11
ID archivio
986e05c4333717579ae62abf0d928f1b
Riferimenti
Pages: 1661-1664