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Type: 
Conference
Description: 
In this paper we present a micromachined Thermal Conductivity Detector (TCD), based on the Ultra Low Power (ULP) technology. The device has been electrically characterized with different Helium gas flows, via a microfluidic experimental setup. Extraction of global thermo-electric parameters, exploited for the development of an electro-thermal Spice model, has been performed directly from the experimental measurements and from 3-D electro-thermal FEM simulations of the device. The resulting Spice model agrees very well with the measurements, with a maximum error less than 0.22%.
Publisher: 
IEEE
Publication date: 
10 May 2011
Authors: 

F Rastrello, P Placidi, A Scorzoni, E Cozzani, M Messina, I Elmi, S Zampolli, GC Cardinali

Biblio References: 
Pages: 1-5
Origin: 
2011 IEEE International Instrumentation and Measurement Technology Conference