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Crystalline micrometer size stripes in 2.2 μm thick Ge2Sb2Te5 phase-change material films were produced by irradiation with a Continuous Wave Laser of 405 nm wavelength. The shape and the dimensions of the crystallized regions were investigated by Transmission Electron Microscopy and then compared with simulations based on temperature-crystal growth velocity literature data. The temperature-time profile was determined taking into account the laser power, the optical and thermal properties of both the amorphous and crystalline phase. The mechanical properties of the amorphous and of the crystallized regions were characterized by an ultra nano-indentation technique. This procedure allows a direct and local measurement of hardness and Young's modulus in the amorphous and in the contiguous crystalline regions on the micrometer scale. The following values for Young's modulus and for hardness …
Publication date: 
3 Feb 2021

G D'Arrigo, M Scuderi, A Mio, G Favarò, M Conte, A Sciuto, M Buscema, G Li-Destri, E Carria, D Mello, M Calabretta, A Sitta, J Pries, E Rimini

Biblio References: 
Pages: 109545
Materials & Design