Metal‐organic (MO)CVD processes adopting the Sr(tmhd)2·pmdeta precursor have been investigated. In‐situ Fourier‐transform infrared spectroscopy (FTIR) monitoring has shown that Sr(tmhd)2·pmdeta possesses a low stability which precludes efficient sublimation/evaporation processes, and requires reactors equipped with a direct liquid injector (DLI) for suitable MOCVD processes. The deposition process results in the formation of polycrystalline SrO and/or SrCO3 films. The kinetics and the mechanism of film growth have been investigated combining in‐situ FTIR techniques and ex‐situ techniques for chemical and structural analyses – energy dispersive X‐ray (EDX) microanalysis, X‐ray photoelectron spectroscopy (XPS), and X‐ray diffraction(XRD). Precursor decomposition occurs above 300 °C, leading to the formation of ketones and SrO films. Temperatures above 400 °C and partial pressures above 9 …