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The ability to form ordered nanostructures at the wafer level with low cost methodologies has represented a challenge in the last decade in many research fields spanning from nanoelectronics to photovoltaics (PVs). For the latter application the nanostructures have demonstrated interesting capabilities for exploiting the quantum effects in terms of efficient visible light absorption. To fabricate ordered nanostructures many solutions have been proposed but they provide feature densities lower than 109 cm−2 or present high fabrication costs. We propose a wafer level and low‐cost Lithography based on block CoPolymers self‐assembling (LCP), which allows the formation of nanofeatures controlled down to 10 nm and density higher than 5 × 1010 cm−2. We propose to use this technique to form radial junctions in nanoholes for solar cells. The approach is similar to that of the nanowires, i.e., it decouples the …
Publication date: 
1 Aug 2013

Cristina Garozzo, Corrado Bongiorno, Salvatore Di Franco, Markus Italia, Antonino La Magna, Silvia Scalese, Paolo Maria Sberna, Rosaria A Puglisi

Biblio References: 
Volume: 210 Issue: 8 Pages: 1564-1570
Physica status solidi (a)