For the successful miniaturization of integrated fluidic devices, it is desirable to have a reliable non-leaking microvalve that can be used in various environments, in a wide temperature range and that is chemically inert. This work describes the design, fabrication and characterization of an innovative pneumatically driven microvalve based on an SU-8 actuating membrane, to be employed in high-speed gas chromatographic (HSGC) applications. In this scenario, a critical constrain is the volume of the microvalve, which needs to be as small as possible to reduce the response time of the chromatograph. The experimental characterization of the fabricated SU-8 microvalves indicates very good sealing properties and low actuating pressures, under different working conditions and in spite of the reduced volume.
1 Jan 2012