A method for the simple manufacture of microelectrode arrays is described. The construction technique is based on microelectronics technology by conventional sputtering deposition of layers of Ni/Cr and Au, photolithography and a final treatment to improve the chemical stability of the device. Cyclic voltammetry at both sulphuric acid and ferricyanide solutions was employed to inspect the operation...
1 Jan 2006
Volume: 113 Issue: 1 Pages: 516-525
Sensors & Actuators: B. Chemical