In this work, we propose a new approach to prepare surface micro-patterns in nanoscale deposited Au films. In particular, we exploit the idea to use a template confined dewetting aging not directly on the deposited Au film but on an underlying poly(methylmethacrylate) (PMMA) substrate by thermal processes. The idea consists of the following basic concepts: (a) to perform nanoscale Au film deposition assisted by micrometric templates to obtain a template confined film and (b) by low-temperature thermal processes (