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Type: 
Journal
Description: 
Publisher: 
Pergamon
Publication date: 
1 Feb 2016
Authors: 

M Zimbone, G Cacciato, MA Buccheri, R Sanz, N Piluso, R Reitano, F La Via, MG Grimaldi, V Privitera

Biblio References: 
Volume: 42 Pages: 28-31
Origin: 
Materials Science in Semiconductor Processing