RF Micro-Electro Mechanical Systems (MEMS) have been developed during the last decade with several applications for commercial as well as space and military sub-systems [1-6]. Technological processes encompassing the utilization of typical microelectronic substrates like alumina, GaAs and Silicon have been considered for the realization of micro-switches by surface micromachining. True time delay lines (TTDL), single port multiple throw (SPMT), matrices and phase shifters take benefit from the low …