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Type: 
Journal
Description: 
In this letter, we report the first resonant-cavity-enhanced single-photon avalanche diode (RCE SPAD) fabricated on a reflecting silicon-on-insulator (SOI) substrate. The substrate incorporates a two-period distributed Bragg reflector fabricated using a commercially available double-SOI process. The RCE SPAD detectors have peak photon detection efficiencies ranging from 42% at 780 nm to 34% at 850 nm and time resolution of 35-ps full-width at half-maximum. Typical dark count rates of 450, 3500, and 100 000 c/s were measured at room temperature with RCE SPADs having, respectively 8-, 20-, and 50-mum diameter.
Publisher: 
IEEE
Publication date: 
22 Feb 2008
Authors: 

Massimo Ghioni, Giacomo Armellini, Piera Maccagnani, Ivan Rech, Matthew K Emsley, M Selim Unlu

Biblio References: 
Volume: 20 Issue: 6 Pages: 413-415
Origin: 
IEEE Photonics Technology Letters