Type:
Book
Description:
RF MEMS switches are currently considered for isolation and transmission of RF signals as the ideal next generation devices with respect to PIN diodes, because of the very low losses, high reliability, no signal distortion and no power consumption. In this work, RF MEMS shunt switches in coplanar waveguide (CPW) configuration have been designed, realized and tested for wideband isolation purposes. SU-8 negative resist technology has been introduced for improving the bridge mechanics and the RF performances of the …
Publisher:
Publication date:
1 Jan 2008
Biblio References:
Pages: 321-328
Origin:
Sensors And Microsystems