Heusler alloys are attractive candidates for application in spin dependent electron transport devices such as Giant Magneto Resistance (GMR), and in magnetic high performing devices. - We have grown by rf-sputtering multilayers of Heusler phase Co{sub 2}MnGe on Al{sub 2}O{sub 3} and MgO substrates. We performed hard X-rays measurements to determine the chemical density profile and the epitaxial orientation inside these systems and polarized neutron reflectivity to study the magnetization profile of thin Co{sub 2}MnGe/Al{sub 2}O{sub 3} and Co{sub 2}MnGe/MgO thin multilayers. X-ray scattering both at small and high angles showed intense Bragg peaks, respectively indicating high interface sharpness and crystallinity of the Heusler phase. Neutron maps, taken at room temperature and 10K, both in saturated and remanence magnetization, evidenced a sharp magnetisation profile at the Heusler/Oxide interfaces with Bragg peaks detected up to the 4th order; the absence of diffuse scattering indicates that the magnetic roughness is very small.