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Type: 
Conference
Description: 
Silicon is the most diffused material for microelectronic industry. We propose a thermo-electrical simulation of an integrated optical modulator realized by ion implantation in SOI wafer. This structure allows to obtain an easier integration with electronic devices.
Publisher: 
IEEE
Publication date: 
21 Sep 2005
Authors: 

Rocco Cristian Zaccuri, Giuseppe Coppola, Mario Iodice

Biblio References: 
Pages: 137-139
Origin: 
IEEE International Conference on Group IV Photonics, 2005. 2nd