Type:
Conference
Description:
Silicon is the most diffused material for microelectronic industry. We propose a thermo-electrical simulation of an integrated optical modulator realized by ion implantation in SOI wafer. This structure allows to obtain an easier integration with electronic devices.
Publisher:
IEEE
Publication date:
21 Sep 2005
Biblio References:
Pages: 137-139
Origin:
IEEE International Conference on Group IV Photonics, 2005. 2nd