IMM Catania unit is equipped with a wide range of facilities for design, manufacture, characterization, and for investigation of materials properties and processes, allowing a global approach to material science research activities.
Due to the high conformality, excellent thickness control, availability of dense and pinhole free films of different materials at low deposition temperature and low cost, atomic layer deposition (ALD) can be a selected technique for the integration of new materials into MOEMS and MEMS devices.
Hippocrateswas a project by Distretto Tecnologico Micro and Nano Sistemi Sicilia S.c.a.r.l. (Sicily Technologic District Micro and Nano systems) sponsored by MIUR (Ministero Istruzione Università e Ricerca) with PON R&C (Programma Operativo Nazionale “Ricerca e Competitività” 2007-2013) funds.
A Gemini Field Emission Scanning Electron Microscope (FE-SEM) Carl Zeiss SUPRA™ 25 is equipped with (i) an EDAX Energy Dispersive X-Rays (EDX) detector, (ii) a Gemini multi-mode scanning Transmission Electron Microscope (STEM) detection system and (iii) a Gatan MonoCL4™ system for cathodolumine
WODIM 2016 has taken place from 27-30 June 2016 at the Hotel Baia Verde, Aci Castello (Catania), Italy. This event was hosted by the Italian National Research Council (CNR) - Institute for Microelectronics and Microsystems (IMM), and celebrated the 10th anniversary of the last time the workshop was held in Italy.
