The research group is focused on three principal missions:

IMM Catania unit is equipped with a wide range of facilities for design, manufacture, characterization, and for investigation of materials properties and processes, allowing a global approach to material science research activities.

Due to the high conformality, excellent thickness control, availability of dense and pinhole free films of different materials at low deposition temperature and low cost, atomic layer deposition (ALD) can be a selected technique for the integration of new materials into MOEMS and MEMS devices.