Sebastiano Bianchi, Elisabetta Comini, Matteo Ferroni, Giorgio Sberveglieri, Luca Pandolfi, Saulius Kaciulis, Wojtek Wlodarski, Mahnaz Shafiei, Sasikaran Kandasamy
 
			  
             
			
				Biblio references: Pages: 183-186   
				Origin: TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference