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Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices

Type: 
Conference
Description: 
Publisher: 
IEEE
Publication date: 
20 Jun 2024
Authors: 

Carlo Trigona, Suhail Ahmed Almani, Alireza Mehdi, Giuliano A Salerno, Vincenzina Strano, Ausrine Bartasyte, Samuel Margueron, Salvatore Baglio, Quentin Micard

Biblio References: 
Pages: 1-5
Origin: 
2024 IEEE International Symposium on Robotic and Sensors Environments (ROSE)
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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